About: http://webisa.webdatacommons.org/13200971

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As is clear to one skilled in the art, a composition such as a composition of the present invention that forms a passivating oxide layer is useful, for example, as a slurry in the CMP of a copper-containing surface.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca