| http://www.w3.org/ns/prov#value | - The insulating layer 121 can be formed with use of an inorganic insulating material such as silicon oxide, silicon nitride, silicon oxynitride, silicon nitride oxide, aluminium oxide, aluminium nitride, or aluminium oxynitride; acrylic acid, methacrylic acid, or a derivative thereof; a heat-resistant polymer such as polyimide, aromatic polyamide; or polybenzimidazole; or a siloxane resin.
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