| http://www.w3.org/ns/prov#value | - The transducer 210 can be composed of piezoelectric material such as piezoelectric ceramic, lead zirconium tintanate, piezoelectric quartz, gallium phosphate wherein the piezoelectric material is bonded to a resonator such as ceramic, silicon carbide, stainless steel or aluminum, or quartz. [0061] As shown in FIG. 2B, the transducer 210 can be significantly smaller than the substrate 202.
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