About: http://webisa.webdatacommons.org/132225684

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The bottom and top conductive plates 20, 22 of the MIM capacitor 18 may have multi-layered combinations of these refractory metals, such as either W or Ta clad below and above with either TiN or TaN, and other like materials.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com