About: http://webisa.webdatacommons.org/132304639

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The CMP device of claim 18, wherein the pad conditioning liquid is one selected from the group including deionized water (DIW), a solution of
http://www.w3.org/ns/prov#wasQuotedFrom	patentgenius.com