About: http://webisa.webdatacommons.org/132307907

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The following is a brief description on a typical peeling procedure and semiconductor device manufacturing method using the present invention.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com