| http://www.w3.org/ns/prov#value | - The semiconductor-processing device of claim 13, wherein the material of construction of said temperature-controlled ceramic surface is selected from the group represented by the following formula: Na Yb wherein N includes boron, aluminum, silicon, titanium, zirconium, or chromium, and Y includes oxygen, nitrogen or carbon and wherein a is an integer of 1-2 and b is an integer of 1-3. 15.
|
