About: http://webisa.webdatacommons.org/132389218

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The present invetion relates to a process for fabricating an integrated circuit device, which includes planarizing steps, such as bulk steps because of electrodes, element isolations, etc. or other steps such as wiring steps.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com