About: http://webisa.webdatacommons.org/132393316

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The protective dielectric film 12 can be formed on the substrate 11 by vapor deposition, sputtering, or other technique well known in the art.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com