About: http://webisa.webdatacommons.org/132518366

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Then, N-type dopants, such as P or Ar, are doped into the substrate 100 to form a drain 190 in the substrate 100 within the third opening 143.
http://www.w3.org/ns/prov#wasQuotedFrom	patentgenius.com