About: http://webisa.webdatacommons.org/132536695

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The wetting unit 4 has a plurality of nozzles 11, via which a fluid, for example DI water, is sprayed onto at least one surface of the wafer 3 in order to moisten it, or in the event that it is already moist to keep it moist.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es