| http://www.w3.org/ns/prov#value | - The method of claim 46 or claim 47 or claim 48 or claim 49 or claim 50 or claim 51 or claim 52 or claim 53 or claim 54 or claim 55 or claim 56 or claim 57 or claim 58 or claim 59 or claim 60 or claim 61 or claim 62 or claim 64 or claim 65 wherein said scanning probe microscope is an atomic force microscope.
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