About: http://webisa.webdatacommons.org/132638006

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	This invention relates to semiconductor physical quantity sensors for detecting a physical quantity such as acceleration or angular velocity, especially, to a capacitance-detecting type semiconductor physical quantity sensor.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es