PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • For example, the first and second element 103 and 105 may be two stages or a substrate and/or reticle and another object, such as a lens or a reference mask coupled to a lens, in an exposure tool.
http://www.w3.org/ns/prov#wasQuotedFrom
  • google.co.uk