| http://www.w3.org/ns/prov#value | - Both of the etching steps, i.e. for the surface and for the mesas, are carried out with an anisotropic wet etch typically selected from the group consisting of potassium hydroxide (KOH), sodium hydroxide (NaOH), potassium hexacyanoferrate (K2[Fe(CN)6]), and combinations thereof.
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