About: http://webisa.webdatacommons.org/133149133

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Moreover, a defect except for a defect caused by the OPC pattern cannot be detected by the lithography simulator.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com