About: http://webisa.webdatacommons.org/133349542

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Cx Ny by providing a sputter apparatus including a vacuum chamber and incorporating therein a carbon target and a deposition substrate.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es