| http://www.w3.org/ns/prov#value | - For the cathode buffer layer 21 c, a small work function thin film, for example, a LiF or a CaF2 is formed by evaporation to have a thickness of 1 to 10 nm, and a film mainly containing aluminum (Al film, AlLi film, AlMg film, or the like) is formed by sputtering or evaporation to have a thickness of about 10 nm to have function as the cathode.
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