About: http://webisa.webdatacommons.org/133907445

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Some particle counters use lasers, such as argon lasers, helium-neon lasers, and the like, to detect surface topography and particles on an exposed surface of a substrate or layer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es