About: http://webisa.webdatacommons.org/134711902

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	While effective, this approach is limited mainly by the difficulty of making the grid 13 extend a sufficient depth below the silicon surface.
http://www.w3.org/ns/prov#wasQuotedFrom	patentgenius.com