About: http://webisa.webdatacommons.org/134970962

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The integrated memory circuit according to claim 2, wherein the nodules are formed by an insulating material, for example silicon nitride. 4.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com