About: http://webisa.webdatacommons.org/135013752

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The rinsing process includes dispensing a rinsing solution, such as deionized water, onto the substrate surface while rotating the substrate.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com