About: http://webisa.webdatacommons.org/135072098

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	When the activation layers 109 through III constituted by crystal silicon films comprising the horizontal growth regions have been formed, a gate insulating film 112 comprising an insulating film including silicon is formed.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca