About: http://webisa.webdatacommons.org/135085431

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The system of claim 16 wherein the first chamber gas introduction and gas exhaust ports supply an atmosphere additionally including hydrogen.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com