About: http://webisa.webdatacommons.org/135092446

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The isolation layer may alternatively be made of an insulating layer such as silicon oxide and may be in the form of a trench or LOCOS layer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com