About: http://webisa.webdatacommons.org/135193470

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The conductive material may include a metal, such as W or Ta, which may be used with a barrier metal, such as WN, TaN or TiN. The conductive material may include doped polysilicon or silicide such as WSi, TiSi, CoSi or NiSi.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com