About: http://webisa.webdatacommons.org/13547690

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The present invention is a scanning method for improving wafer image depth-of-focus (DOF) of a lithographic step and scan projection system.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com