| http://www.w3.org/ns/prov#value | - That is, Step SS20 is a step for discriminating whether or not the current shot is one for transferring the low magnification alignment marks WPR and WPL. Step SS22 is a step for discriminating whether or not the current shot is one for transferring the high-magnification alignment marks CRR and CRL. Step SS24 is a step for discriminating whether or not the current shot is the last shot.
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