About: http://webisa.webdatacommons.org/135572262

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The concentration of all the impurities including carbon was not more than 5.times.10.sup.14 cm.sup.-3 except for Si over the entire crystal.
http://www.w3.org/ns/prov#wasQuotedFrom	patentgenius.com