About: http://webisa.webdatacommons.org/135598666

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The terms ???wafer??? and ???substrate??? used in the description include any structure having an exposed surface with which to form an electronic device or device component such as a component of an integrated circuit (IC).
http://www.w3.org/ns/prov#wasQuotedFrom	freshpatents.com