About: http://webisa.webdatacommons.org/135602832

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	This barrier function of the auxiliary layer is of great importance for example in the case when copper is used as metal for the metal layer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com