About: http://webisa.webdatacommons.org/135642800

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Photolithography is a technique for shaping a thin film into a desired geometry by fabricating a resist mask by an photolithography machine and etching the portions of the thin film that are not protected by the resist mask.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au