About: http://webisa.webdatacommons.org/135644487

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The reach of MEMS is now extending to materials other than silicon, and the scope of applications is proceeding beyond the simple physical regime (e.g. accelerometers and pressure sensors) to chemical and biological sensors.
http://www.w3.org/ns/prov#wasQuotedFrom	totalmateria.com