About: http://webisa.webdatacommons.org/135687519

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The method as in claim 1, wherein said single plasma operation includes a gas mixture including N2 and H2 and said N2 constitutes 10-70 volume % of said gas mixture and said H2 constitutes 30-90 volume % of said gas mixture.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com