About: http://webisa.webdatacommons.org/135693887

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	This invention relates to the purging and pumping of a vacuum chamber, and more particularly to a method of pumping to ultra-high vacuum, a vacuum chamber suitable for use in the manufacture of integrated circuit structures.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr