About: http://webisa.webdatacommons.org/135727400

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The present invention is a spray tool and method for dispensing a processing fluid toward a substrate surface, such as a semiconductor wafer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au