About: http://webisa.webdatacommons.org/135780741

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The lower silicon-based layer 202 could comprise a substrate made for example from single crystal silicon, polycrystalline silicon, or glass.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr