About: http://webisa.webdatacommons.org/135793476

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The process according to claim 4, wherein the substrate is a quartz substrate and the layer of a nontransparent material is a chromium layer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com