About: http://webisa.webdatacommons.org/135825899

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The present embodiment is an embodiment in which the present invention is applied to an optical fabrication (a laser lithographic) apparatus.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com