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Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Besides, inorganic materials such as silicon oxide, silicon nitride, silicon oxynitride, PSG (phosphosilicate glass), PBSG (phosphorus boron silicate glass), BPSG (borophosphosilicate glass), an alumina film can also be used.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com