About: http://webisa.webdatacommons.org/136233183

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	(3) Next, a mask comprised of a-Si was formed over the areas other than the areas in which to form n-type diamond semiconductor layers 4a, 4b.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com