About: http://webisa.webdatacommons.org/136395963

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Referring to FIG. 2E, a passivation layer 31 is formed on the insulating interlayer 25 by CVD of an insulating substance such as silicon oxide, silicon nitride, or the like, to cover the source and drain electrodes 29 and 30.
http://www.w3.org/ns/prov#wasQuotedFrom	google.co.uk