| http://www.w3.org/ns/prov#value | - If that first material is polysilicon, the second material can be a ceramic, such as SiC, or silicon nitride (SixNy), or even polysilicon itself, deposited under different conditions so as to induce a different grain structure and crystal defect concentration, and thus different IRS. FIG. 8 is a table that lists the CTE of some example materials.
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