About: http://webisa.webdatacommons.org/136949703

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Of these materials, SiOF is an insulating material having the lowest specific dielectric constant in inorganic materials formable by a plasma CVD method which has been hitherto used.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com