About: http://webisa.webdatacommons.org/137123309

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In the step for forming the silicon oxide film 13, an oxidizing solution or an oxidizing gas may be used other than the mixed solution of the aqueous hydrogen peroxide solution and the sulfuric acid.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es