About: http://webisa.webdatacommons.org/137167575

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In the drawings, denoted at 1 is a first object such as a mask, and denoted at 2 is a second object such as a wafer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com