About: http://webisa.webdatacommons.org/137403007

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Furthermore, the process should be versatile to form silicon-containing compounds with varied elemental concentrations while having a fast deposition rate and maintaining a process temperature, such as about 800??? C. or less.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au