About: http://webisa.webdatacommons.org/137490703

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Subsequently, ions such as hydrogen ions are implanted to a predetermined depth in the silicon substrate 11 through the silicon oxide layer 14 to form a defective layer (ion implanted layer) serving as the separation layer 12.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com