About: http://webisa.webdatacommons.org/137517588

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Further, the peripheral region might be thicker due to reasons other than photoresist application and processing, for example due to a thicker portion of the amorphous carbon being formed at the periphery during its formation.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com