About: http://webisa.webdatacommons.org/137540514

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Furthermore, the relationship between the relative positioning of the substrate and target and target erosion is dependent on target material, magnetron design, the absolute distance from target to substrate and other factors.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com